Quartz boat is a kind of experimental equipment made of high-purity quartz material, which is usually used for chemical reactions, heat treatment or carrying and transmission in semiconductor manufacturing process under high temperature environment. Quartz boat has excellent high temperature resistance, chemical stability and electrical insulation, can maintain stable shape and performance at high temperature, is not easy to react chemically with reactants, and will not introduce impurities.

In semiconductor manufacturing, quartz boat is often used in diffusion, oxidation, annealing and other processes as a container for carrying silicon wafers or chips to ensure that the silicon wafers or chips are evenly heated at high temperature and avoid direct contact with heating elements and damage. In addition, quartz boat can also be used in other fields that require high temperature treatment, such as ceramic sintering, metal heat treatment, etc.